Theoretical examination of thermo-migration in novel platinum microheaters

Conductometric gas sensors based on SMO films must be heated to temperatures up 550 °C in order initiate the molecular adsorption process at film's surface. Very often platinum is used as microheater material. The long-term reliability of these devices are primarily associated with mechanical stability micro-electro-mechanical systems (MEMS) structures hold suspended and thermally isolated from other integrated components, such analog digital circuitry. However, previous studies have shown that electro-migration thermo-migration phenomena could potentially exacerbate stress build-up microheaters contribute their eventual failure. In this manuscript we propose a means quantify impact vacancy transport two novel designs under phenomena. first design aimed improved temperature uniformity second array operation, taking advantage high gradients simultaneously provide multiple different sensor locations. Our analysis shows force much higher than force, meaning thermal far more atom induced by electron wind. Furthermore, calculate our proposed highly resistant failure due migration calculating mean-time-to-failure 1015 seconds typical operating conditions.